Collect. Czech. Chem. Commun.
1995, 60, 372-382
https://doi.org/10.1135/cccc19950372
Adsorption and Thermal Decomposition of Tetrakis(dimethylamido)titanium on Si and SiO2/Si Surfaces: an XPS Study
Michaela Janovská and Zdeněk Bastl
J. Heyrovský Institute of Physical Chemistry, Academy of Sciences of the Czech Republic, 182 23 Prague 8, Czech Republic
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